diff --git a/scripts/src/cpu.lua b/scripts/src/cpu.lua
index 62abccc0754..4e04557f487 100644
--- a/scripts/src/cpu.lua
+++ b/scripts/src/cpu.lua
@@ -744,7 +744,7 @@ if (CPUS["E1"]~=null) then
 	files {
 		MAME_DIR .. "src/devices/cpu/e132xs/e132xs.cpp",
 		MAME_DIR .. "src/devices/cpu/e132xs/e132xs.h",
-		MAME_DIR .. "src/devices/cpu/e132xs/e132xsdefs.h",
+		MAME_DIR .. "src/devices/cpu/e132xs/32xsdefs.h",
 		MAME_DIR .. "src/devices/cpu/e132xs/e132xsop.hxx",
 	}
 end
@@ -1333,7 +1333,7 @@ if (CPUS["M6805"]~=null) then
 	files {
 		MAME_DIR .. "src/devices/cpu/m6805/m6805.cpp",
 		MAME_DIR .. "src/devices/cpu/m6805/m6805.h",
-		MAME_DIR .. "src/devices/cpu/m6805/6805defs.h",
+		MAME_DIR .. "src/devices/cpu/m6805/m6805defs.h",
 		MAME_DIR .. "src/devices/cpu/m6805/6805ops.hxx",
 		MAME_DIR .. "src/devices/cpu/m6805/m68705.cpp",
 		MAME_DIR .. "src/devices/cpu/m6805/m68705.h",
diff --git a/scripts/target/mame/arcade.lua b/scripts/target/mame/arcade.lua
index fed378829d6..dde5cf69a25 100644
--- a/scripts/target/mame/arcade.lua
+++ b/scripts/target/mame/arcade.lua
@@ -1295,13 +1295,13 @@ files {
 	MAME_DIR .. "src/mame/drivers/bfm_sc4.cpp",
 	MAME_DIR .. "src/mame/drivers/bfm_sc5.cpp",
 	MAME_DIR .. "src/mame/includes/bfm_sc5.h",
-	MAME_DIR .. "src/mame/drivers/bfm_sc5.hxx",
+	MAME_DIR .. "src/mame/drivers/bfm_sc5sw.hxx",
 	MAME_DIR .. "src/mame/drivers/bfm_ad5.cpp",
 	MAME_DIR .. "src/mame/includes/bfm_ad5.h",
-	MAME_DIR .. "src/mame/drivers/bfm_ad5.hxx",
+	MAME_DIR .. "src/mame/drivers/bfm_ad5sw.hxx",
 	MAME_DIR .. "src/mame/machine/bfm_sc45_helper.cpp",
 	MAME_DIR .. "src/mame/machine/bfm_sc45_helper.h",
-	MAME_DIR .. "src/mame/includes/bfm_sc45.h",
+	MAME_DIR .. "src/mame/includes/bfm_sc4.h",
 	MAME_DIR .. "src/mame/drivers/bfm_swp.cpp",
 	MAME_DIR .. "src/mame/drivers/bfmsys83.cpp",
 	MAME_DIR .. "src/mame/drivers/bfmsys85.cpp",
diff --git a/scripts/target/mame/mess.lua b/scripts/target/mame/mess.lua
index 32f315c8b00..772ea1f834b 100644
--- a/scripts/target/mame/mess.lua
+++ b/scripts/target/mame/mess.lua
@@ -1316,7 +1316,7 @@ files {
 	MAME_DIR .. "src/mame/machine/apricotkb.cpp",
 	MAME_DIR .. "src/mame/machine/apricotkb.h",
 	MAME_DIR .. "src/mame/drivers/victor9k.cpp",
-	MAME_DIR .. "src/mame/includes/victor9k.h",
+--	MAME_DIR .. "src/mame/includes/victor9k.h",
 	MAME_DIR .. "src/mame/machine/victor9k_kb.cpp",
 	MAME_DIR .. "src/mame/machine/victor9k_kb.h",
 	MAME_DIR .. "src/mame/machine/victor9k_fdc.cpp",
@@ -2442,7 +2442,7 @@ files {
 	MAME_DIR .. "src/mame/drivers/mk1.cpp",
 	MAME_DIR .. "src/mame/drivers/mk2.cpp",
 	MAME_DIR .. "src/mame/drivers/novag6502.cpp",
-	MAME_DIR .. "src/mame/drivers/novagbase.h",
+	MAME_DIR .. "src/mame/includes/novagbase.h",
 	MAME_DIR .. "src/mame/drivers/novag68k.cpp",
 	MAME_DIR .. "src/mame/drivers/novagmcs48.cpp",
 	MAME_DIR .. "src/mame/drivers/ssystem3.cpp",
@@ -3253,7 +3253,7 @@ files {
 createMESSProjects(_target, _subtarget, "wang")
 files {
 	MAME_DIR .. "src/mame/drivers/wangpc.cpp",
-	MAME_DIR .. "src/mame/includes/wangpc.h",
+	MAME_DIR .. "src/devices/bus/wangpc/wangpc.h",
 	MAME_DIR .. "src/mame/machine/wangpckb.cpp",
 	MAME_DIR .. "src/mame/machine/wangpckb.h",
 }